@article{Barylo_Holyaka_Marusenkova_Ivakh_2021, title={Structure and 3-D Model of a Solid State Thin-Film Magnetic Sensor: Array}, volume={22}, url={https://journals.pnu.edu.ua/index.php/pcss/article/view/5015}, DOI={10.15330/pcss.22.3.444-452}, abstractNote={<p>Vector 3-D magnetic sensors form the basis of measurement devices for magnetic field mapping and magnetic tracking. Typically, such sensors utilize specific constructions based on split Hall structures (SHS). An SHS-based 3-D magnetic sensor is a bulk semiconductor integrated structure with 8 or more contacts. Combining current flow directions through the contacts and measuring the corresponding voltages, one defines projections B<sub>X</sub>, B<sub>Y</sub>, B<sub>Z</sub> of the magnetic field vector. This work presents a novel design of 3-D solid state magnetic sensors that requires no insulation by p-n junctions and can be implemented by thin-film technology traditionally used for fabrication of Hall sensors including those based on InSb films. Besides, a SPICE model of the 3-D magnetic sensor is provided, which helps design the proposed sensor and refine techniques of its calibration.</p>}, number={3}, journal={Physics and Chemistry of Solid State}, author={Barylo, G.I. and Holyaka, R.L. and Marusenkova, T.A. and Ivakh, M.S.}, year={2021}, month={Aug.}, pages={444–452} }