NOVOSYADLYJ, S.P.; BOYKO, S.I.; KOTYK , M.V. Features Multilevel Metallization Forming a Submicron Structures of Large Integrated Circuits. Physics and Chemistry of Solid State, [S. l.], v. 17, n. 4, p. 630–636, 2016. DOI: 10.15330/pcss.17.4.630-636. Disponível em: https://journals.pnu.edu.ua/index.php/pcss/article/view/1240. Acesso em: 23 may. 2024.