Novosjadly S, Terletsky A, Fryk O. Formation CMOS Schemes on GaAs with Self-Aligned Nitride and Silicide Gates. Phys.Chem.Sol.State [Internet]. 2015 Jun. 15 [cited 2024 Nov. 24];16(2):420-4. Available from: https://journals.pnu.edu.ua/index.php/pcss/article/view/1696