1.
Novosyadlyj S, Boyko S, Kotyk M. Features Multilevel Metallization Forming a Submicron Structures of Large Integrated Circuits. PCSS [Internet]. 2016Dec.15 [cited 2020Jul.7];17(4):630-6. Available from: https://journals.pnu.edu.ua/index.php/pcss/article/view/1240