Petrov V, Kryuchyn A, Gorbov I, Pankratova A, Manko D, Borodin Y, et al. Formation of submicron relief structures on the surface of sapphire substrates. Phys. Chem. Sol. State [Internet]. 2023 Jun. 14 [cited 2024 May 10];24(2):298-303. Available from: https://journals.pnu.edu.ua/index.php/pcss/article/view/6706