Laser Formation of Periodic Micro- and Nanostructures on the Surface of Monocrystalline Silicon

  • I. A. Mohylyak Pidstryhach Institute for Applied Problems of Mechanics and Mathematics NASU
  • O. Yu. Bonchyk Pidstryhach Institute for Applied Problems of Mechanics and Mathematics
  • S. A. Korniy Karpenko physico-mechanical institute
  • S. G. Kiyak Pidstryhach Institute for Applied Problems of Mechanics and Mathematics
  • D. I. Popovych Pidstryhach Institute for Applied Problems of Mechanics and Mathematics
Keywords: laser-induced periodic surface structures (LIPSS), nanostructuring, electron-hole plasma, recrystallization zone

Abstract

Experimental studies of the features of the formation of laser-induced periodic nanostructures on the surface of silicon wafers in the zones of action of second, millisecond and nanosecond laser pulses are conducted in the work. The results of microscopic investigations by optical and electron microscopes of periodic structures formed on surfaces with crystallographic orientation (111), (100) are presented. The obtained results can be used to optimize the laser pulse mode for controlled micro- nanostructuring of the semiconductor surface.

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Published
2020-06-15
How to Cite
MohylyakI. A., BonchykO. Y., KorniyS. A., KiyakS. G., & PopovychD. I. (2020). Laser Formation of Periodic Micro- and Nanostructures on the Surface of Monocrystalline Silicon. Physics and Chemistry of Solid State, 21(2), 215-218. https://doi.org/10.15330/pcss.21.2.215-218
Section
Scientific articles