Investigation of optical and electrophysical properties of Mn4Si7 coatings of different thickness

B.D. Igamov; I.R. Bekpulatov; G.T. Imanova; A.I. Kamardin; D.A. Normurodov

doi:10.15330/pcss.25.2.421-427

Authors

B.D. Igamov Scientific and technical center with a design bureau and pilot production of the Academy of Sciences of the Republic of Uzbekistan, Tashkent, Republic of Uzbekistan
I.R. Bekpulatov Karshi State University, Karshi city, Uzbekistan
G.T. Imanova Institute of Radiation Problems, Ministry of Science and Education Republic of Azerbaijan, Baku, Azerbaijan; Western Caspian University, Baku, Azerbaijan; Khazar University, Department of Physics and electeonics, Baku, Azerbaijan
A.I. Kamardin Scientific and technical center with a design bureau and pilot production of the Academy of Sciences of the Republic of Uzbekistan, Tashkent, Republic of Uzbekistan
D.A. Normurodov Karshi State University, Karshi city, Uzbekistan

DOI:

https://doi.org/10.15330/pcss.25.2.421-427

Keywords:

transmission, absorption and reflection coefficients of coatings, Seebeck coefficient, thin coating, nanostructure, resistivity

Abstract

Studies of Mn₄Si₇ coatings of different thicknesses have shown that magnetron deposition practically does not change the composition of the coating in comparison with the composition of the target. The technology and basic modes of creating the necessary targets for a magnetron sputtering device are presented. Targets were created by adding silicon and manganese powders in the required amount and heating them under vacuum conditions at high temperature and pressure. Thin silicide films (coatings) of different thicknesses were formed on the surface of silicon dioxide from the produced targets using the method of magnetron sputtering. Studies of the transmission, absorption, and reflection coefficients of coatings in the visible region of the spectrum have shown that for the Mn₄Si₇ coating, the reflection coefficient is practically the same at all wavelengths. It was found that the Seebeck coefficient varies from 16 µV/K to 22 µV/K, and the resistance decreases from 77 Ω to 20 Ω with increasing thickness of the thin Mn₄Si₇ coating.

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