Indium Saving Indium Tin Oxide Thin Films Deposited by Sputtering at Room Temperature
DOI:
https://doi.org/10.15330/pcss.18.1.69-74Keywords:
indium saving indium tin oxide, magnetron sputtering, electric properties, optical propertiesAbstract
Indium saving indium tin oxide ITO thin films have been deposited using a sputtering deposition technique in pure Ar and in mixed argon-oxygen atmosphere at room temperature. A transmittance value of more than 85 % in the visible region of the spectrum and a resistivity of 2420 µΩcm has been obtained for the thin films deposited in pure Ar and subsequently heat treated at 923 K. The structure of the as-deposited indium saving indium-tin oxide films was amorphous and the crystallinity was improved with increasing heat treatment temperature. An increase in the heat treatment temperature does not enhance the transmittance of the films at oxygen flow rate higher than 0.4 cm3/min.
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[3] C. Guillén, J. Herrero, Thin Solid Films 480–481, 129 (2005).
[4] J. Ma, D. Zhang, S. Li, J. Zhao, H. Ma, Jpn. J. Appl. Phys. 37, 5614 (1998).
[5] F. O. Aduodija, H. Izumi, T. Ishihara, H. Yoshioka, M. Motoyama, K. Murai, Jpn. J. Appl. Phys. 39, L377 (2000).
[6] H. Kim, C. M. Gilmore, A. Pique, J. S. Horwitz, H. Mattoussi, H. Murata, Z. H. Kafafi, and D. B. Chrisey, J. Appl. Phys. 86, 6451 (1999).
[7] P. K. Biswas, A. De, K. Ortner, S. Korder, Materials Letters 58, 1540 (2004).
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[9] K. Utsumi, H. Iigusa, R. Tokumaru, P.K. Song, Y. Shigesato, Thin Solid Films 445, 229 (2003).
[10] L. Voisin, M. Ohtsuka, T. Nakamura, Mater. Trans. 51(3), 503 (2010).
[11] L. Voisin, M. Ohtsuka and T. Nakamura, ICCE-17 International Conference, (Hawaii, USA, 2009).
[12] L. Kerkache, A. Layadi, A. Mosser, Journal of Alloys and Compounds 485, 46 (2009).
[13] K.-H. Kim, Journal of Ceramic Processing Research. 8, 19 (2007).
[14] S. Li, X. Qiao, J. Chen, Materials Chemistry and Physics 98, 144 (2006).
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Published
2017-03-15
How to Cite
Voisin, L., Ohtsuka, M., Nakamura, T., Petrovska, S., Ilkiv, B., & Sergiienko, R. (2017). Indium Saving Indium Tin Oxide Thin Films Deposited by Sputtering at Room Temperature. Physics and Chemistry of Solid State, 18(1), 69–74. https://doi.org/10.15330/pcss.18.1.69-74
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