Morphology of titanium nanofilms onto sapphire at annealing in vacuum
DOI:
https://doi.org/10.15330/pcss.26.1.78-83Keywords:
morphology, nanofilms, sapphire, titanium, surface interactionAbstract
A change in the morphology of titanium films on the surface of sapphire was investigated when heated in a vacuum. The coatings interact with the substrate, forming two phases with different adhesion to sapphire. Probably the phase with low adhesion is an intermetallides of the titаnium-aluminum system, and the phase with high adhesion is titanium oxide.
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