Investigation of Angular Spectrum of Scattered Inert Gas Ions from the InGaP (001) Surface
DOI:
https://doi.org/10.15330/pcss.22.4.742-745Keywords:
Ion scаttering, Semichаnnel, Computer simulаtion, Angular distribution, Ion focusingAbstract
It has been shown that this method is quite suitable for surface studies and diagnostics of many component materials. The values of the azimuthal angle of distribution of Ne, Ar and Xe ions scattered from InGaP (001) <110> are obtained. The relationship between the spatial variables of the scattered beam (mainly azimuthal angular spectra) and the type of ions has been established. The correlation between focusing properties of surface semichannel with a type of bombardment ion at the different angle of incidence has been shown.
References
S.S. Lu, C.C. Huаng, IEEE Electron Device Lett. 13, 214 (1992); https://doi.org/10.1109/55.145025.
Y. Wang, K.H. Lee, W.Kh. Loke, S.B. Chiah, X. Zhou, S.Y. Yoon, Ch.S. Tan, E. Fitzgerald, AIP Adv. 8, 115132 (2018); https://doi.org/10.1063/1.5058717.
T. Oka, K. Hirata, H. Suzuki, K. Ouchi, H. Uchiyama, T. Taniguchi, K. Mochizuki, T. Nakamura, IEEE Trans. Electron Dev. 48(11) 2625 (2001); https://doi.org/10.1109/16.960388.
U.B. Sharopov, K. Kaur, M.K. Kurbanov, D.Sh. Saidov, E.T. Juraev, M.M. Sharipov, Silicon (2021); https://doi.org/10.1007/s12633-021-01268-0.
U.B.Sharopov, K.Kaur, M.K.Kurbanov, D.Sh.Saidov, Sh.R.Nurmatov, M.M.Sharipov, B.E.Egamberdiev. Thin Solid Films 735, 138902 (2021); https://doi.org/10.1016/j.tsf.2021.138902.
M.K. Karimov, U.O. Kutliev, Sh.K. Ismailov, M.U. Otaboev, e-Journal of Surface Science and Nanotechnology 18, 164 (2020); https://doi.org/10.1380/ejssnt.2020.164.
U.B. Sharopov, B.G. Atabaev, R. Djabbarganov, Journal of Surface Investigation, X-ray, Synchrotron and Neutron Techniques 14(1) 101 (2020); https://doi.org/10.1134/S1027451020010164.
U.B. Sharopov, B.G. Atabaev, R. Djabbarganov, M.K. Kurbanov, M.M. Sharipov, J. Surf. Invest. 10 No 1, 245 (2016); https://doi.org/10.1134/S1027451016010328.
E.S. Mashkova, V. Molchanov, Medium-Energy Ion Reflection from Solids (Amsterdam: North-Holland: 1985).
E.S. Parilis, N.Yu. Turaev, F.F. Umarov 1975 Radiat. Eff. 24, 207 (1985).
J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids (NY: Pergamon Press: 1985).
E.S. Parilis, L.M. Kishinevsky, N.Yu. Turaev, B.E. Baklitzky, F.F. Umarov, V.Kh. Verleger, S.L. Nizhnaya, I.S. Bitensky, Atomic Collisions on Solid Surfaces (North-Holland: Amsterdam: 1993).
M.K. Karimov, U.O. Kutliev, K.U. Otaboeva, M.U. Otaboev, J. Nano- Electron. Phys. 12(5), 05032 (2020); https://doi.org/10.21272/jnep.12(5).05032.
U.Kutliev, M.Karimov, B.Sadullaeva, M.Otaboev. COMPUSOFT, An international journal of advanced computer technology 7, 2749 (2018).
U.O. Кutliev, M.К. Кarimov, M.U. Otaboev, Inorganic Materials: Applied Research 11, 503 (2020); https://doi.org/10.1134/S2075113320030272.
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