Structure and Vibrational Spectra of thin Films β-Ga2O3

  • O.M. Bordun Ivan Franko Lviv National University
  • M.V. Partyka Ivan Franko Lviv National University
  • I.I. Medvid Ivan Franko Lviv National University
  • I.Yo. Kukharskyy Ivan Franko Lviv National University
  • V.V. Ptashnyk Ivan Franko Lviv National University
  • B.O. Bordun Ivan Franko Lviv National University
Keywords: gallium oxide, thin films, vibrational spectra

Abstract

The structure, phase composition and surface morphology of thin films b-Ga2O3, obtained by high-frequency ion-plasma sputtering, after annealing at different atmosphere was investigated. The spectra of IR reflection of system thin film b-Ga2O3 - fused quartz substrate υ-SiO2 in region 400–1600 cm-1 at 295 K were measured. The peaks in the spectrum of films b-Ga2O3, associated with vibration of Ga – O fragments in structural tetrahedral GaO4 and octahedral GaO6 complexes was interpreted.

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Published
2016-12-15
How to Cite
BordunO., Partyka M., MedvidI., KukharskyyI., PtashnykV., & BordunB. (2016). Structure and Vibrational Spectra of thin Films β-Ga2O3. Physics and Chemistry of Solid State, 17(4), 515-519. https://doi.org/10.15330/pcss.17.4.515-519
Section
Scientific articles

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