Aging Processes in Implanted Fluorine Ions and Laser Irradiated Films of LaGa:YIG
Based on the results of X-ray structural analysis, changes in the crystalline structure during natural aging and laser annealing, which occurred in near-surface layers of epitaxial films of LaGa-substituted Iron-Yttrium Garnet, implanted by F+ ions, were studied. The processes that occur during the ion implantation by F+ in ferrite-garnet films, and the processes that accompany the low-temperature aging of ion-implanted films are considered. From the experimental rocking curves, obtained immediately after ion implantation, after the laser irradiation and after several years, strain profiles were determined. Two stages in the changes of the crystalline structure of the nearsurface disturbed layer over time are revealed. During the first of them, the maximum deformation in the ionimplanted layer increased slightly, and on the second it decreased. It was established that the results of laser annealing and natural aging of near-surface layers implanted by F+ ions and laser irradiated LaGa:YIG films depend on the direction from which laser irradiation occurred. However, the result of their total exposure does not depend on the side of laser irradiation.
Ion beam applications in surface and bulk modification of insulators (International Atomic Energy Agency, Vienna, 2008).
V.S. Vavilov, A.E. Kiv, O.R. Niyazova, Mekhanizmy obrazovaniya i migratsii defektov v poluprovodnikakh (Nauka, Moskva, 1981).
I. Yaremiy, S. Yaremiy, M. Povkh, O. Vlasii, V. Fedoriv, A. Luсas, Eastern-European Journal of Enterprise Technologies, 6(12 (96)), (2018) (doi: 10.15587/1729-4061.2018.151806).
I.P. Yaremiy, M.M. Povkh, V.O. Kotsyubynsky, V.D. Fedoriv, S.I. Yaremiy, R.I. Pashkovska, Physics and Chemistry of Solid State 20(1), (2019) (doi: 10.15330/pcss.20.1.56-62).
J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1985).
B.K. Ostafiychuk, V.D. Fedoriv, I.P. Yaremiy et al., Phys. Status Solidi A 208(9), (2011) (doi:10.1002/pssa.201026749).
V.B. Molodkin, S.I. Olikhovskii, E.N. Kislovskii et al., Phys. Status Solidi A 227(2), (2001).
S.I. Olikhovskii, V.B. Molodkin, E.N. Kislovskii et al., Phys. Status Solidi A 231(1), (2002).
V.M. Pylypiv, O.S. Skakunova, T.P. Vladimirova et al., Metallofizika i Noveishie Tekhnologii 34(11) (2013).
B.K. Ostafiychuk, V.D. Fedoriv, L.S. Yablon et al., Physics and Chemistry of Solid State, 3(4), (2002).
I. Izhnin, V. Bogoboyashchyy, F. Sizov, Proc. SPIE 5957, 595713 (2005).
I.I. Izhnin, E.I. Fitsych, A.Yu. Bonchik, G.V. Savitskiy i.dr., Izvestiya vysshikh uchebnykh zavedeniy. Fizika 55 (8/2) 150 (2012).
B.K. Ostafiychuk, I.P. Yaremiy, S.I. Yaremiy et al., Metallofizika i Noveishie Tekhnologii 35(10) (2012).
A.V. Dvurechenskiy, G.A. Kachurin, E.V. Nidaev, L.S. Smirnov, Impul'snyy otzhig poluprovodnikovykh materialov (Nauka, Moskva, 1982).
R.I. Batalov, V.V. Vorobev, V.I. Nuzhdin et al., Opt. Spectrosc. 125, 571 (2018). (doi:10.1134/S0030400X18100065).
V.P. Voronkov, G.A. Gurchenok, Fizika i tekhnika poluprovodnikov (10), 1831 (1990).
V.V. Titov, Rol' mekhanicheskikh napryazheniy pri legirovanii materialov s pomoshch'yu ionnykh puchkov (Preprint IAE-3774/11, Moskva, 1983).
B.K. Ostafiychuk, I.M.Budzulyak, I.P. Yaremiy et al., Physics and Chemistry of Solid State, 9(1), (2008).