Light dispersion and edge absorption in Ga1–xAlxN thin films (x=0; 0.03; 0.07)
DOI:
https://doi.org/10.15330/pcss.26.2.203-208Keywords:
gallium nitride, thin films, refractive index dispersion, fundamental absorption edgeAbstract
The dispersion of the refractive index and the region of the fundamental absorption edge in Ga1–xAlxN (x=0; 0.03; 0.07) thin films obtained by high-frequency ion-plasma sputtering have been investigated. It is shown that the dispersion dependence of the obtained films has a complex form. It was found that the value of the optical band gap increases from 3.28 to 3.58 eV with increasing Al concentration from 0 to 7 mol%. Based on the determined direct-band allowed photoelectron transitions in the region of the fundamental absorption edge, the value of the combined effective mass of free charge carriers and their concentration was estimated. It is shown that the shift of the fundamental absorption edge in Ga1–xAlxN thin films (x = 0, 0.03, 0.07) is due to the Burstein-Moss effect.
References
F. Roccaforte and M. Leszczynski, Nitride Semiconductor Technology. Power Electronics and Optoelectronic Devices, (Wiley-VCH Verlag GmbH & Co. KGaA, 2020).
C.M. Furqan, Jacob Y.L. Ho, H.S. Kwok, GaN thin film: Growth and Characterizations by Magnetron Sputtering, Surfaces and Interfaces, 26, 101364 (2021); https://doi.org/10.1016/j.surfin.2021.101364.
S. Musumeci and V. Barba, Gallium Nitride Power Devices in Power Electronics Applications: State of Art and Perspectives, Energies 16, 3894 (2023); https://doi.org/10.3390/en16093894.
L. Srinivasan, C. Jadaud, F. Silva, J.-Ch. Vanel, J.-L. Maurice, E. Johnson, P. Roca i Cabarrocas and K. Ouaras, Reactive plasma sputtering deposition of polycrystalline GaN thin films on silicon substrates at room temperature, J. Vac. Sci. Technol. A, 41 (5): 053407 (2023); https://doi.org/10.1116/6.0002718.
O. M. Bordun, B. O. Bordun, I. Yo. Kukharskyy and I. I. Medvid, X-Ray Luminescence of β-Ga2O3 Thin Films, J. Appl. Spectrosc., 86(6), 1010 (2020); https://doi.org/10.1007/s10812-020-00932-4.
D. Kaur and M. Kumar, A Strategic Review on Gallium Oxide Based Deep-Ultraviolet Photodetectors: Recent Progress and Future Prospects, Adv. Optical Mater., 9(9), 2002160 (2021); https://doi.org/10.1002/adom.202002160.
O. M. Bordun, B. O. Bordun, I. Yo. Kukharskyy and I. I. Medvid, Photoluminescence Properties of β-Ga2O3 Thin Films Produced by Ion-Plasma Sputtering, J. Appl. Spectrosc., 84(1), 46 (2017); https://doi.org/10.1007/s10812-017-0425-3.
A. Zhong, L. Wang, Y. Tang, Yo. Yang, J. Wang, H. Zhu, Zh. Wu, W. Tang and B. Li, Assessing high-energy x-ray and proton irradiation effects on electrical properties of P-GaN and N-GaN thin films, Chin. Phys. B, 32, 076102 (2023); https://doi.org/10.1088/1674-1056/accb8a.
M. Monish, Sh. Mohan, D. S. Sutar and S. S. Major, Gallium nitride films of high n-type conductivity grown by reactive sputtering, Semicond. Sci. Technol., 35(4), 045011 (2020); https://doi.org/10.1088/1361-6641/ab73ec.
V. Bondar, I. Kucharsky, B. Simkiv, L. Akselrud, V. Davydov, Yu. Dubov and S. Popovich, Low-Temperature Synthesis of Gallium Nitride Thin Films Using Reactive RF-Magnetron Sputtering, Phys. Stat. Sol. (a), 176(1), 329 (1999); https://doi.org/10.1002/(SICI)1521-396X(199911)176:1<329::AID-PSSA329>3.0.CO;2-E.
N. Li, Ch. P. Ho, Sh. Zhu, Yu. H. Fu, Y. Zhu and L.Y.T. Lee, Aluminium nitride integrated photonics: a review, Nanophotonics, 10(9), 2347 (2021); https://doi.org/10.1515/nanoph-2021-0130.
W. A. Doolittle, C. M. Matthews, H. Ahmad, K. Motoki, S. Lee, A. Ghosh, E. N. Marshall, A. L. Tang, P. Manocha, and P. D. Yoder, Prospectives for AlN electronics and optoelectronics and the important role of alternative synthesis, Appl. Phys. Lett., 123, 070501 (2023); https://doi.org/10.1063/5.0156691.
M. Beshkova and R. Yakimova, Properties and potential applications of two-dimensional AlN, Vacuum, 176, 109231 (2020); https://doi.org/10.1016/j.vacuum.2020.109231.
K. Wasa, M. Kitabatake, and H. Adachi, Thin film materials technology: – Sputtering of compound materials, (William Andrew Inc. publishing, Springer-Verlag GmbH&Co. KG, 2004).
O. M. Bordun, I. Yo. Kukharskyy, M. V. Protsak, I. I. Medvid, I. M. Kofliuk, Zh. Ya. Tsapovska, and D. S. Leonov, Synthesis and Structure of Thin GaN Films by Radio-Frequency Sputtering, Nanosistemi, Nanomateriali, Nanotehnologii, 22(2), 287 (2024); https://doi.org/10.15407/nnn.22.02.287.
R. Swanepoel, Determination of the thickness and optical constants of amorphous silicon, J. Phys. E: Sci. Instrum., 16 (12), 1214 (1983); https://doi.org/1010.1088/0022-3735/16/12/023.
Heba E. Atyia and N.A. Hegab, Optical spectroscopy and dispersion parameters of Ge15Se60X25 (X = As or Sn) amorphous thin films, Eur. Phys. J. Appl. Phys., 63, 10301 (2013); https://doi.org/10.1051/epjap/2013130099.
O. M. Bordun, I. Yo. Kukharskyy, B. O. Bordun and V. B. Lushchanets, Dispersion of Refractive Index of β-Ga2O3 Thin Films, J Appl Spectrosc, 81(5), 771 (2014); https://doi.org/10.1007/s10812-014-0004-9.
I. M. Tsidilkovski and R. S. Wadhwa, Band Structure of Semiconductors (Pergamon Press Ltd., Germany, 1982).
I. Bhat, Physical properties of gallium nitride and related III–V nitrides. In: B. J. Baliga, Wide Bandgap Semiconductor Power Devices. Materials, Physics, Design, and Applications (Woodhead Publishing, 2019); https://doi.org/10.1016/B978-0-08-102306-8.00003-4.
C. Persson, A. Ferreira da Silva, R. Ahuja and B. Johansson, Effective electronic masses in wurtzite and zinc-blende GaN and AlN, J. Cryst. Growth, 231(3), 397 (2001); https://doi.org/10.1016/S0022-0248(01)01470-1
J. I. Pankove, Optical Processes in Semiconductors (Dover Publications, Inc., New York, 1971).
H.L. Hartnagel, A.L. Dawar, A.K. Jain and C. Jagadish, Semiconducting Transparent Thin Films (Institute of Physics Pub., Bristol, 1995).
T.P. McLean, The absorption edge spectrum of semiconductors, Progress in semiconductors, 5, 53 (1960).
T. Hofmann, V. Darakchieva, B. Monemar, H. Lu, W.J. Schaff and M. Schubert, Optical Hall Effect in Hexagonal InN, J. Electron. Mater., 37, 611 (2008); https://doi.org/10.1007/s11664-008-0385-8.
N. Armakavicius, S. Knight, Ph. Kühne, V. Stanishev, D. Q. Tran, S. Richter, A. Papamichail, M. Stokey, P. Sorensen, U. Kilic, M. Schubert, P. P. Paskov and V. Darakchieva, Electron effective mass in GaN revisited: New insights from terahertz and mid-infrared optical Hall effect, APL Mater., 12, 021114 (2024); https://doi.org/10.1063/5.0176188.
S. Schöche, P. Kühne, T. Hofmann, M. Schubert, D. Nilsson, A. Kakanakova-Georgieva, E. Janzén, and V. Darakchieva, Electron effective mass in Al0.72Ga0.28N alloys determined by mid-infrared optical Hall effect, Appl. Phys. Lett., 103, 212107 (2013); https://doi.org/10.1063/1.4833195.
O.M. Bordun, I.Yo. Kukharskyy, I.I. Medvid and Zh.Ya. Tsapovska, Edge Absorption of (Y0.06Ga0.94)2O3 Thin Films, Phys. and Chem. of Solid State, 8(1), 89 (2017); https://doi.org/10.15330/pcss.18.1.89-93.
S. Knight, A. Mock, R. Korlacki, V. Darakchieva, B. Monemar, Yo. Kumagai, K. Goto, M. Higashiwaki and M. Schubert, Electron effective mass in Sn-doped monoclinic single crystal β-gallium oxide determined by mid-infrared optical Hall effect, Appl. Phys. Lett., 112, 012103 (2018); https://doi.org/10.1063/1.5011192.
E. F. Schubert, Physical Foundations of Solid-State Devices (Rensselaer Polytechnic Institute, Troy NY, USA, 2006).
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